Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812300 | Silicon target for sputtering film formation and method for forming silicon-containing thin film | Hiroki Yoshikawa, Hideo Kaneko | 2017-11-07 |
| 9798229 | Designing of photomask blank and photomask blank | Kouhei Sasamoto, Hideo Kaneko, Souichi Fukaya | 2017-10-24 |
| 9778559 | Method for preparing halftone phase shift photomask blank | Takuro Kosaka | 2017-10-03 |
| 9709885 | Photomask blank and method for manufacturing photomask blank | Takashi Yoshii, Toyohisa Sakurada, Akira Ikeda, Hideo Kaneko, Satoshi Watanabe +1 more | 2017-07-18 |
| 9689066 | Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method | Hiroki Yoshikawa, Souichi Fukaya, Hideo Nakagawa | 2017-06-27 |
| 9651858 | Binary photomask blank, preparation thereof, and preparation of binary photomask | Takuro Kosaka, Kazuhiro Nishikawa | 2017-05-16 |
| 9645485 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Hideo Kaneko, Toyohisa Sakurada | 2017-05-09 |
| 9618838 | Photomask blank | Souichi Fukaya | 2017-04-11 |
| 9581892 | Method of manufacturing photomask blank and photomask blank | Souichi Fukaya | 2017-02-28 |
| 9541823 | Photomask blank | Kouhei Sasamoto, Souichi Fukaya, Hideo Nakagawa, Hideo Kaneko | 2017-01-10 |