Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9812300 | Silicon target for sputtering film formation and method for forming silicon-containing thin film | Hiroki Yoshikawa, Yukio Inazuki | 2017-11-07 |
| 9798229 | Designing of photomask blank and photomask blank | Kouhei Sasamoto, Yukio Inazuki, Souichi Fukaya | 2017-10-24 |
| 9709885 | Photomask blank and method for manufacturing photomask blank | Yukio Inazuki, Takashi Yoshii, Toyohisa Sakurada, Akira Ikeda, Satoshi Watanabe +1 more | 2017-07-18 |
| 9645485 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Yukio Inazuki, Toyohisa Sakurada | 2017-05-09 |
| 9541823 | Photomask blank | Kouhei Sasamoto, Yukio Inazuki, Souichi Fukaya, Hideo Nakagawa | 2017-01-10 |