Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Souichi Fukaya, Hideo Nakagawa | 2017-12-26 |
| 9798229 | Designing of photomask blank and photomask blank | Hideo Kaneko, Yukio Inazuki, Souichi Fukaya | 2017-10-24 |
| 9798230 | Photomask blank | Souichi Fukaya | 2017-10-24 |
| 9541823 | Photomask blank | Yukio Inazuki, Souichi Fukaya, Hideo Nakagawa, Hideo Kaneko | 2017-01-10 |