Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851633 | Inorganic material film, photomask blank, and method for manufacturing photomask | Souichi Fukaya, Kouhei Sasamoto | 2017-12-26 |
| 9689066 | Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method | Hiroki Yoshikawa, Souichi Fukaya, Yukio Inazuki | 2017-06-27 |
| 9541823 | Photomask blank | Kouhei Sasamoto, Yukio Inazuki, Souichi Fukaya, Hideo Kaneko | 2017-01-10 |