Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627204 | Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition | Tsutomu Ogihara, Takafumi Ueda, Seiichiro Tachibana | 2017-04-18 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Seiichiro Tachibana, Rie Kikuchi, Tsutomu Ogihara, Yoshio Kawai, Karen E. Petrillo +1 more | 2017-02-28 |