Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805943 | Polymer for resist under layer film composition, resist under layer film composition, and patterning process | Takeru Watanabe, Seiichiro Tachibana, Tsutomu Ogihara | 2017-10-31 |
| 9728420 | Organic film composition, process for forming organic film, patterning process, and compound | Daisuke KORI, Kazumi Noda, Kazunori Maeda, Tsutomu Ogihara | 2017-08-08 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Seiichiro Tachibana, Yoshinori Taneda, Tsutomu Ogihara, Yoshio Kawai, Karen E. Petrillo +1 more | 2017-02-28 |