Issued Patents 2017
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805943 | Polymer for resist under layer film composition, resist under layer film composition, and patterning process | Rie Kikuchi, Takeru Watanabe, Seiichiro Tachibana | 2017-10-31 |
| 9804492 | Method for forming multi-layer film and patterning process | Jun Hatakeyama | 2017-10-31 |
| 9798242 | Rinse solution for pattern formation and pattern forming process | Jun Hatakeyama, Daisuke KORI | 2017-10-24 |
| 9728420 | Organic film composition, process for forming organic film, patterning process, and compound | Daisuke KORI, Kazumi Noda, Kazunori Maeda, Rie Kikuchi | 2017-08-08 |
| 9632416 | Rinse solution for pattern formation and pattern forming process | Jun Hatakeyama, Daisuke KORI | 2017-04-25 |
| 9627204 | Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition | Takafumi Ueda, Yoshinori Taneda, Seiichiro Tachibana | 2017-04-18 |
| 9624356 | Ultraviolet absorber, composition for forming a resist under layer film, and patterning process | Daisuke KORI | 2017-04-18 |
| 9620363 | Underlayer film-forming composition and pattern forming process | Jun Hatakeyama, Daisuke KORI | 2017-04-11 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Seiichiro Tachibana, Yoshinori Taneda, Rie Kikuchi, Yoshio Kawai, Karen E. Petrillo +1 more | 2017-02-28 |