Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9805943 | Polymer for resist under layer film composition, resist under layer film composition, and patterning process | Rie Kikuchi, Takeru Watanabe, Tsutomu Ogihara | 2017-10-31 |
| 9671694 | Wet strippable gap fill materials | Martin Glodde, Ratnam Sooriyakumaran, Hoa D. Truong | 2017-06-06 |
| 9627204 | Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition | Tsutomu Ogihara, Takafumi Ueda, Yoshinori Taneda | 2017-04-18 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Yoshinori Taneda, Rie Kikuchi, Tsutomu Ogihara, Yoshio Kawai, Karen E. Petrillo +1 more | 2017-02-28 |