Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671694 | Wet strippable gap fill materials | Ratnam Sooriyakumaran, Seiichiro Tachibana, Hoa D. Truong | 2017-06-06 |
| 9580623 | Patterning process using a boron phosphorus silicon glass film | Seiichiro Tachibana, Yoshinori Taneda, Rie Kikuchi, Tsutomu Ogihara, Yoshio Kawai +1 more | 2017-02-28 |
| 9551696 | Cleanability assessment of sublimate from lithography materials | Mark S. Chace, Margaret C. Lawson, Janine L. Protzman, Qin Yuan | 2017-01-24 |