Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551696 | Cleanability assessment of sublimate from lithography materials | Mark S. Chace, Martin Glodde, Janine L. Protzman, Qin Yuan | 2017-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551696 | Cleanability assessment of sublimate from lithography materials | Mark S. Chace, Martin Glodde, Janine L. Protzman, Qin Yuan | 2017-01-24 |