Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798242 | Rinse solution for pattern formation and pattern forming process | Jun Hatakeyama, Tsutomu Ogihara | 2017-10-24 |
| 9785049 | Method for forming multi-layer film and patterning process | Jun Hatakeyama | 2017-10-10 |
| 9728420 | Organic film composition, process for forming organic film, patterning process, and compound | Kazumi Noda, Kazunori Maeda, Rie Kikuchi, Tsutomu Ogihara | 2017-08-08 |
| 9632416 | Rinse solution for pattern formation and pattern forming process | Jun Hatakeyama, Tsutomu Ogihara | 2017-04-25 |
| 9624356 | Ultraviolet absorber, composition for forming a resist under layer film, and patterning process | Tsutomu Ogihara | 2017-04-18 |
| 9620363 | Underlayer film-forming composition and pattern forming process | Jun Hatakeyama, Tsutomu Ogihara | 2017-04-11 |