Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9804103 | Inspection method, template substrate, and focus offset method | Riki Ogawa | 2017-10-31 |
| 9797846 | Inspection method and template | — | 2017-10-24 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi +4 more | 2017-10-03 |
| 9626755 | Mask inspection apparatus and mask inspection method | Nobutaka Kikuiri, Ikunao Isomura | 2017-04-18 |
| 9542586 | Pattern inspection apparatus and pattern inspection method | Eiji Matsumoto, Nobutaka Kikuiri | 2017-01-10 |