Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846760 | Writing data verification method and multi-charged particle beam writing apparatus | — | 2017-12-19 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Hiroshi Yamashita, Yasuo Kato, Saori Gomi, Shinji Sakamoto +4 more | 2017-10-03 |
| 9715994 | Charged particle beam drawing apparatus, format check apparatus and format check method | — | 2017-07-25 |
| 9659745 | Charged particle beam drawing apparatus, information processing apparatus and pattern inspection apparatus | — | 2017-05-23 |
| 9558315 | Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus | Shigehiro Hara | 2017-01-31 |