Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Shinji Sakamoto +4 more | 2017-10-03 |
| 9734981 | Charged particle beam writing apparatus and charged particle beam writing method | Hitoshi Higurashi | 2017-08-15 |