Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852876 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hideo Inoue, Hiroshi Matsumoto, Ryoh KAWANA | 2017-12-26 |
| 9837247 | Charged particle beam writing apparatus and method utilizing a sum of the weighted area density of each figure pattern | Hiroshi Matsumoto | 2017-12-05 |
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Shigehiro Hara, Kenichi Yasui, Hiroshi Yamashita, Saori Gomi, Shinji Sakamoto +4 more | 2017-10-03 |
| 9601315 | Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method | Ryoh KAWANA | 2017-03-21 |
| 9564293 | Charged particle beam writing apparatus, and buffer memory data storage method | Jun Yashima | 2017-02-07 |