Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852876 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Yasuo Kato, Hideo Inoue, Hiroshi Matsumoto | 2017-12-26 |
| 9601315 | Multiple charged particle beam lithography apparatus and multiple charged particle beam pattern writing method | Yasuo Kato | 2017-03-21 |