Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9659747 | Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus | — | 2017-05-23 |
| 9564293 | Charged particle beam writing apparatus, and buffer memory data storage method | Yasuo Kato | 2017-02-07 |
| 9548183 | Charged particle beam writing apparatus, and charged particle beam writing method | — | 2017-01-17 |