Jun Yashima — 3 Patents at Nuflare Technology

Issued Patents 2017

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date
9659747	Method of generating write data for energy beam writing apparatus, method of writing with energy beam, and energy beam writing apparatus	—	2017-05-23
9564293	Charged particle beam writing apparatus, and buffer memory data storage method	Yasuo Kato	2017-02-07
9548183	Charged particle beam writing apparatus, and charged particle beam writing method	—	2017-01-17