Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779913 | Charged particle beam drawing apparatus and drawing data generation method | Kenichi Yasui, Hiroshi Yamashita, Yasuo Kato, Saori Gomi, Shinji Sakamoto +4 more | 2017-10-03 |
| 9558315 | Method of generating write data, multi charged particle beam writing apparatus, and pattern inspection apparatus | Kenichi Yasui | 2017-01-31 |