Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811896 | Measuring apparatus | Nobutaka Kikuiri | 2017-11-07 |
| 9767547 | Inspection method and inspection apparatus | Masaya Takeda | 2017-09-19 |
| 9728373 | Pattern inspection apparatus and pattern inspection method | Nobutaka Kikuiri | 2017-08-08 |
| 9659361 | Measuring apparatus that generates positional deviation distribution of a pattern on a target object | Nobutaka Kikuiri | 2017-05-23 |
| 9626755 | Mask inspection apparatus and mask inspection method | Hideo Tsuchiya, Nobutaka Kikuiri | 2017-04-18 |
| 9535015 | Pattern inspection method and pattern inspection apparatus | — | 2017-01-03 |