Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811896 | Measuring apparatus | Ikunao Isomura | 2017-11-07 |
| 9728373 | Pattern inspection apparatus and pattern inspection method | Ikunao Isomura | 2017-08-08 |
| 9691143 | Inspection apparatus and inspection apparatus system | Hiromu Inoue | 2017-06-27 |
| 9659361 | Measuring apparatus that generates positional deviation distribution of a pattern on a target object | Ikunao Isomura | 2017-05-23 |
| 9626755 | Mask inspection apparatus and mask inspection method | Hideo Tsuchiya, Ikunao Isomura | 2017-04-18 |
| 9575010 | Inspection apparatus and inspection method | Riki Ogawa, Hideaki Hashimoto | 2017-02-21 |
| 9542586 | Pattern inspection apparatus and pattern inspection method | Eiji Matsumoto, Hideo Tsuchiya | 2017-01-10 |