Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846928 | Inspection method and inspection apparatus | Masatoshi Hirono | 2017-12-19 |
| 9804103 | Inspection method, template substrate, and focus offset method | Hideo Tsuchiya | 2017-10-31 |
| 9683947 | Defect inspection device | Masatoshi Hirono, Takeshi Fujiwara | 2017-06-20 |
| 9575010 | Inspection apparatus and inspection method | Nobutaka Kikuiri, Hideaki Hashimoto | 2017-02-21 |
| 9557277 | Inspection apparatus and inspection method | Hiromu Inoue | 2017-01-31 |