Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834840 | Process kit shield for improved particle reduction | Muhammad M. Rasheed, Zhendong Liu, Xinyu Fu, Xianmin Tang | 2017-12-05 |
| 9752228 | Sputtering target for PVD chamber | Zhendong Liu, Xianmin Tang, Srinivas Gandikota, Tza-Jing Gung, Muhammad M. Rasheed | 2017-09-05 |
| 9689070 | Deposition ring and electrostatic chuck for physical vapor deposition chamber | Muhammad M. Rasheed, Keith A. Miller | 2017-06-27 |
| 9633839 | Methods for depositing dielectric films via physical vapor deposition processes | Weimin Zeng, Thanh X. Nguyen, Yana Cheng, Yong Cao, Daniel Lee Diehl +2 more | 2017-04-25 |