Issued Patents 2017
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816810 | Measurement of multiple patterning parameters | Andrei V. Shchegrov, Shankar Krishnan, Kevin Peterlinz, Thaddeus Gerard Dziura, Stilian Ivanov Pandev | 2017-11-14 |
| 9784690 | Apparatus, techniques, and target designs for measuring semiconductor parameters | Andrei V. Shchegrov, Stilian Ivanov Pandev | 2017-10-10 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Irina Paykin, Alexander Svizher +4 more | 2017-08-22 |
| 9739719 | Measurement systems having linked field and pupil signal detection | Jiyou Fu | 2017-08-22 |
| 9645079 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Daniel Kandel | 2017-05-09 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more | 2017-02-28 |
| 9546946 | Metrology target indentification, design and verification | Boris Golovanevsky | 2017-01-17 |