Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851300 | Decreasing inaccuracy due to non-periodic effects on scatterometric signals | Ofer Zaharan, Amnon Manassen, Nadav Carmel, Victoria Naipak, Alexander Svizher +2 more | 2017-12-26 |
| 9784987 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Ohad Bachar, Mark Ghinovker, Zeev Bomzon +1 more | 2017-10-10 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Daniel Kandel, Yoel Feler, Noam Sapiens, Irina Paykin, Alexander Svizher +4 more | 2017-08-22 |
| 9726984 | Aperture alignment in scatterometry metrology systems | Nadav Carmel | 2017-08-08 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Daniel Kandel +8 more | 2017-02-28 |