YF

Yoel Feler

KL Kla-Tencor: 3 patents #38 of 395Top 10%
Overall (2017): #53,550 of 506,227Top 15%
3
Patents 2017

Issued Patents 2017

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
9841689 Approach for model calibration used for focus and dose measurement Vladimir Levinski, Daniel Kandel, Nadav Gutman 2017-12-12
9739702 Symmetric target design in scatterometry overlay metrology Barak Bringoltz, Daniel Kandel, Noam Sapiens, Irina Paykin, Alexander Svizher +4 more 2017-08-22
9581430 Phase characterization of targets Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more 2017-02-28