| 9851300 |
Decreasing inaccuracy due to non-periodic effects on scatterometric signals |
Barak Bringoltz, Ofer Zaharan, Amnon Manassen, Nadav Carmel, Victoria Naipak +2 more |
2017-12-26 |
| 9841689 |
Approach for model calibration used for focus and dose measurement |
Vladimir Levinski, Yoel Feler, Nadav Gutman |
2017-12-12 |
| 9784987 |
Apodization for pupil imaging scatterometry |
Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Ohad Bachar, Mark Ghinovker +1 more |
2017-10-10 |
| 9739702 |
Symmetric target design in scatterometry overlay metrology |
Barak Bringoltz, Yoel Feler, Noam Sapiens, Irina Paykin, Alexander Svizher +4 more |
2017-08-22 |
| 9678421 |
Target element types for process parameter metrology |
Vladimir Levinski, Feler Yoel |
2017-06-13 |
| 9645079 |
Structured illumination for contrast enhancement in overlay metrology |
Joel Seligson, Noam Sapiens |
2017-05-09 |
| 9620426 |
Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation |
Pavel Izikson, John Robinson |
2017-04-11 |
| 9581430 |
Phase characterization of targets |
Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more |
2017-02-28 |