Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9851300 | Decreasing inaccuracy due to non-periodic effects on scatterometric signals | Barak Bringoltz, Ofer Zaharan, Amnon Manassen, Nadav Carmel, Victoria Naipak +2 more | 2017-12-26 |
| 9841689 | Approach for model calibration used for focus and dose measurement | Vladimir Levinski, Yoel Feler, Nadav Gutman | 2017-12-12 |
| 9784987 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Ohad Bachar, Mark Ghinovker +1 more | 2017-10-10 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Yoel Feler, Noam Sapiens, Irina Paykin, Alexander Svizher +4 more | 2017-08-22 |
| 9678421 | Target element types for process parameter metrology | Vladimir Levinski, Feler Yoel | 2017-06-13 |
| 9645079 | Structured illumination for contrast enhancement in overlay metrology | Joel Seligson, Noam Sapiens | 2017-05-09 |
| 9620426 | Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation | Pavel Izikson, John Robinson | 2017-04-11 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more | 2017-02-28 |