Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651943 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | John Robinson, Mike Adel, Amir Widmann, DongSub Choi, Anat Marchelli | 2017-05-16 |
| 9620426 | Method and system for providing process tool correctables using an optimized sampling scheme with smart interpolation | John Robinson, Daniel Kandel | 2017-04-11 |
| 9606453 | Method and system for providing tool induced shift using a sub-sampling scheme | Guy M. Cohen | 2017-03-28 |