Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9709903 | Overlay target geometry for measuring multiple pitches | David Tien | 2017-07-18 |
| 9651943 | Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers | Pavel Izikson, John Robinson, Mike Adel, Amir Widmann, Anat Marchelli | 2017-05-16 |