Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841689 | Approach for model calibration used for focus and dose measurement | Daniel Kandel, Yoel Feler, Nadav Gutman | 2017-12-12 |
| 9739702 | Symmetric target design in scatterometry overlay metrology | Barak Bringoltz, Daniel Kandel, Yoel Feler, Noam Sapiens, Irina Paykin +4 more | 2017-08-22 |
| 9678421 | Target element types for process parameter metrology | Feler Yoel, Daniel Kandel | 2017-06-13 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Daria Negri, Boris Golovanevsky, Barak Bringoltz +8 more | 2017-02-28 |