Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832852 | EUV LPP source with dose control and laser stabilization using variable width laser pulses | Robert Jay Rafac | 2017-11-28 |
| 9735535 | Drive laser for EUV light source | Alexander I. Ershov, Jerzy Hoffman, Norbert Bowering | 2017-08-15 |
| 9713239 | Laser produced plasma EUV light source | Bjorn Hansson, Alexander N. Bykanov, David C. Brandt | 2017-07-18 |
| 9669334 | Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material | William N. Partlo, Gregory O. Vaschenko, William Oldham | 2017-06-06 |
| 9541840 | Faceted EUV optical element | David C. Brandt, Alexander I. Ershov | 2017-01-10 |