Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832852 | EUV LPP source with dose control and laser stabilization using variable width laser pulses | Igor V. Fomenkov | 2017-11-28 |
| 9832854 | Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation | Daniel Jason Riggs | 2017-11-28 |
| 9820368 | Target expansion rate control in an extreme ultraviolet light source | Daniel Jason Riggs | 2017-11-14 |
| 9709897 | Polarization control of pulsed light beam | Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Ivan Lalovic | 2017-07-18 |
| 9713240 | Stabilizing EUV light power in an extreme ultraviolet light source | Daniel Jason Riggs | 2017-07-18 |