Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832854 | Systems and methods for stabilization of droplet-plasma interaction via laser energy modulation | Robert Jay Rafac | 2017-11-28 |
| 9820368 | Target expansion rate control in an extreme ultraviolet light source | Robert Jay Rafac | 2017-11-14 |
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Steven Chang +1 more | 2017-09-05 |
| 9713240 | Stabilizing EUV light power in an extreme ultraviolet light source | Robert Jay Rafac | 2017-07-18 |
| 9536631 | Systems and methods to avoid instability conditions in a source plasma chamber | — | 2017-01-03 |