Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Spencer Rich, Matthew R. Graham, Steven Chang, Wayne J. Dunstan +1 more | 2017-09-05 |