Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9832853 | Alignment of light source focus | Matthew R. Graham, William N. Partlo, Robert A. Bergstedt | 2017-11-28 |
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Wayne J. Dunstan +1 more | 2017-09-05 |
| 9658861 | Boot strap processor assignment for a multi-core processing unit | Anshuman Thakur, Ramacharan Sundararaman, Ramon Matas, Jay S. Lawlor, Robert F. Netting | 2017-05-23 |