Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9755396 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Paul Frihauf, Andrew Liu, Spencer Rich, Matthew R. Graham, Steven Chang +1 more | 2017-09-05 |
| 9588430 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Jeroen van der Burgt, Matthew R. Graham, Charles E. Kinney | 2017-03-07 |