Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9669334 | Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material | Igor V. Fomenkov, William N. Partlo, Gregory O. Vaschenko | 2017-06-06 |