Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9469777 | Resist underlayer film forming composition that contains novolac resin having polynuclear phenol | Tetsuya Shinjo, Keisuke Hashimoto, Yasunobu Someya, Hirokazu Nishimaki, Ryo Karasawa +1 more | 2016-10-18 |
| 9395628 | Resist underlayer film-forming composition containing aryl sulfonate salt having hydroxyl group | Keisuke Hashimoto, Hirokazu Nishimaki, Rikimaru Sakamoto | 2016-07-19 |
| 9250525 | Resist underlayer film-forming composition | Rikimaru Sakamoto, Noriaki Fujitani | 2016-02-02 |
| 9244353 | Resist underlayer film forming composition | Hirokazu Nishimaki, Keisuke Hashimoto, Tetsuya Shinjo, Rikimaru Sakamoto | 2016-01-26 |
| 9240327 | Resist underlayer film-forming composition for EUV lithography containing condensation polymer | Rikimaru Sakamoto, Noriaki Fujitani, Ryuji Ohnishi, Bangching Ho | 2016-01-19 |