Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494864 | Resist overlayer film forming composition for lithography and method for manufacturing semiconductor device using the same | Ryuji Ohnishi, Rikimaru Sakamoto | 2016-11-15 |
| 9240327 | Resist underlayer film-forming composition for EUV lithography containing condensation polymer | Rikimaru Sakamoto, Noriaki Fujitani, Takafumi Endo, Ryuji Ohnishi | 2016-01-19 |