Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494864 | Resist overlayer film forming composition for lithography and method for manufacturing semiconductor device using the same | Rikimaru Sakamoto, Bangching Ho | 2016-11-15 |
| 9448480 | Resist underlayer film formation composition and method for forming resist pattern using the same | Tokio NISHITA, Noriaki Fujitani, Rikimaru Sakamoto | 2016-09-20 |
| 9240327 | Resist underlayer film-forming composition for EUV lithography containing condensation polymer | Rikimaru Sakamoto, Noriaki Fujitani, Takafumi Endo, Bangching Ho | 2016-01-19 |