Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401015 | Defect classification method, and defect classification system | Yohei Minekawa, Yuji Takagi, Minoru Harada, Ryo Nakagaki | 2016-07-26 |
| 9390490 | Method and device for testing defect using SEM | Yuji Takagi, Minoru Harada, Ryo Nakagaki, Naoki Hosoya, Toshifumi Honda | 2016-07-12 |
| 9342878 | Charged particle beam apparatus | Kohei Yamaguchi, Fumihiko Fukunaga | 2016-05-17 |
| 9342879 | Method and apparatus for reviewing defect | Yohei Minekawa, Kenji Nakahira, Minoru Harada, Ryo Nakagaki | 2016-05-17 |
| 9335277 | Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method | Ryo Nakagaki, Kenji Obara | 2016-05-10 |
| 9311697 | Inspection method and device therefor | Minoru Harada, Ryo Nakagaki, Naoki Hosoya | 2016-04-12 |
| 9305343 | Observation device and observation method | Kenji Nakahira, Atsushi Miyamoto | 2016-04-05 |
| 9280814 | Charged particle beam apparatus that performs image classification assistance | Kenji Obara, Kozo Miyake | 2016-03-08 |