Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401015 | Defect classification method, and defect classification system | Yohei Minekawa, Yuji Takagi, Minoru Harada, Takehiro Hirai | 2016-07-26 |
| 9390490 | Method and device for testing defect using SEM | Yuji Takagi, Minoru Harada, Naoki Hosoya, Toshifumi Honda, Takehiro Hirai | 2016-07-12 |
| 9342879 | Method and apparatus for reviewing defect | Yohei Minekawa, Kenji Nakahira, Minoru Harada, Takehiro Hirai | 2016-05-17 |
| 9335277 | Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method | Takehiro Hirai, Kenji Obara | 2016-05-10 |
| 9311697 | Inspection method and device therefor | Minoru Harada, Takehiro Hirai, Naoki Hosoya | 2016-04-12 |