Issued Patents 2016
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523648 | Defect inspection device and defect inspection method | Yuta Urano, Yukihiro Shibata | 2016-12-20 |
| 9513228 | Defect inspection method and its device | Yukihiro Shibata, Kei Shimura, Sachio Uto | 2016-12-06 |
| 9506876 | X-ray inspection device, inspection method, and X-ray detector | Yuta Urano, Yasuko Aoki | 2016-11-29 |
| 9488596 | Defect inspection method and device for same | Yuta Urano, Hisashi Hatano | 2016-11-08 |
| 9470640 | Defect inspection method and defect inspection device | Shunichi Matsumoto, Atsushi Taniguchi, Yukihiro Shibata, Yuta Urano | 2016-10-18 |
| 9436990 | Defect observation method and device therefor | Yuko Otani, Shunichi Matsumoto | 2016-09-06 |
| 9390490 | Method and device for testing defect using SEM | Yuji Takagi, Minoru Harada, Ryo Nakagaki, Naoki Hosoya, Takehiro Hirai | 2016-07-12 |
| 9360434 | Optical inspection apparatus and method thereof | Kenji Nakahira | 2016-06-07 |
| 9329137 | Defect inspection method and device using same | Yukihiro Shibata, Hideki Fukushima, Yuta Urano | 2016-05-03 |
| 9329136 | Defect inspection device and defect inspection method | Yuta Urano, Takahiro Jingu, Akira Hamamatsu | 2016-05-03 |
| 9310318 | Defect inspection method and defect inspection device | Yuta Urano, Yukihiro Shibata | 2016-04-12 |
| 9291574 | Defect inspection method and defect inspection device | Shunichi Matsumoto, Atsushi Taniguchi, Yukihiro Shibata, Yuta Urano | 2016-03-22 |
| 9267898 | Optical inspection method and optical inspection apparatus | Kenji Nakahira, Toshihiko Nakata | 2016-02-23 |
| 9255793 | Defect inspection method and device thereof | Yukihiro Shibata, Taketo Ueno, Atsushi Taniguchi | 2016-02-09 |
| 9255888 | Defect inspection method and device for same | Yuta Urano, Hisashi Hatano | 2016-02-09 |
| 9239283 | Defect inspection method and device therefor | Yukihiro Shibata, Atsushi Taniguchi | 2016-01-19 |