Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390885 | Superposition measuring apparatus, superposition measuring method, and superposition measuring system | Takuma Yamamoto, Yasunori Goto | 2016-07-12 |
| 9342878 | Charged particle beam apparatus | Kohei Yamaguchi, Takehiro Hirai | 2016-05-17 |