| 9516729 |
Variable radius mirror dichroic beam splitter module for extreme ultraviolet source |
Kevin W. Zhang, Michael A. Purvis, Alexander Anthony Schafgans |
2016-12-06 |
| 9462668 |
Target for extreme ultraviolet light source |
Yezheng Tao, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich |
2016-10-04 |
| 9426872 |
System and method for controlling source laser firing in an LPP EUV light source |
Daniel Jason Riggs |
2016-08-23 |
| RE45957 |
Regenerative ring resonator |
Hong Ye, Richard L. Sandstrom, Rostislav Rokitski, Daniel J. W. Brown |
2016-03-29 |
| 9239269 |
Calibration of photoelectromagnetic sensor in a laser source |
Rong (Lauren) Liu, David W. Myers, Robert A. Bergstedt, Paul Alexander McKenzie |
2016-01-19 |
| 9239268 |
Calibration of photoelectromagnetic sensor in a laser source |
Rong (Lauren) Liu, David W. Myers, Robert A. Bergstedt, Paul Alexander McKenzie |
2016-01-19 |
| 9232623 |
Extreme ultraviolet light source |
Richard L. Sandstrom, Daniel John William Brown, Kai-Chung Hou |
2016-01-05 |
| 9232624 |
Target for laser produced plasma extreme ultraviolet light source |
Yezheng Tao |
2016-01-05 |