Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9426872 | System and method for controlling source laser firing in an LPP EUV light source | Robert Jay Rafac | 2016-08-23 |
| 9240664 | System and method for extending gas life in a two chamber gas discharge laser system | — | 2016-01-19 |