Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Kevin W. Zhang, Robert Jay Rafac, Alexander Anthony Schafgans | 2016-12-06 |
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown +2 more | 2016-05-31 |