Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Michael A. Purvis, Robert Jay Rafac, Alexander Anthony Schafgans | 2016-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9516729 | Variable radius mirror dichroic beam splitter module for extreme ultraviolet source | Michael A. Purvis, Robert Jay Rafac, Alexander Anthony Schafgans | 2016-12-06 |