Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9357625 | Extreme ultraviolet light source | Yezheng Tao, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown, Jason Michael Arcand +2 more | 2016-05-31 |
| 9338870 | Extreme ultraviolet light source | Yezheng Tao, Daniel J. W. Brown | 2016-05-10 |