Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462668 | Target for extreme ultraviolet light source | Robert Jay Rafac, Igor V. Fomenkov, Daniel John William Brown, Daniel J. Golich | 2016-10-04 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Daniel John William Brown, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom +1 more | 2016-06-28 |
| 9357625 | Extreme ultraviolet light source | John Tom Stewart, IV, Jordan Jur, Andrew David LaForge, Daniel J. W. Brown, Jason Michael Arcand +2 more | 2016-05-31 |
| 9338870 | Extreme ultraviolet light source | John Tom Stewart, IV, Daniel J. W. Brown | 2016-05-10 |
| 9232624 | Target for laser produced plasma extreme ultraviolet light source | Robert Jay Rafac | 2016-01-05 |