Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9462668 | Target for extreme ultraviolet light source | Yezheng Tao, Robert Jay Rafac, Igor V. Fomenkov, Daniel J. Golich | 2016-10-04 |
| 9390827 | EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods | William N. Partlo, Richard L. Sandstrom, Igor V. Fomenkov | 2016-07-12 |
| 9380691 | Adaptive laser system for an extreme ultraviolet light source | Yezheng Tao, Alexander Anthony Schafgans, Michael David Caudill, Daniel J. Golich, Richard L. Sandstrom +1 more | 2016-06-28 |
| 9232623 | Extreme ultraviolet light source | Robert Jay Rafac, Richard L. Sandstrom, Kai-Chung Hou | 2016-01-05 |